2018 旭硝子財団 助成研究発表会 要旨集

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2(b) MEMS3MEMS150kHz30MEMS4(a)12dB1Vp-p2m4(b)[1]PZTAlN[2]AlN20 MEMS 3. 4. [1] Zhou, S. Yoshida, and S. Tanaka, Sensors Actuators A Phys., vol. 266, pp. 352–360, Oct. 2017. [2] R. J. Przybyla, S. E. Shelton, A. Guedes, I. I. Izyumin, M. H. Kline, D. A. Horsley, and B. E. Boser, IEEE Sens. J., vol. 11, no. 11, pp. 2690–2697, Nov. 2011. 5. 980-85796-6-01 113() TEL: 022-795-6937 FAX: 022-795-6935 s-yoshida@mems.mech.tohoku.ac.jp 2PZTa(b) 3PZTMEMS(a) (b) (a)A-A 4(a) MEMS (b)SN －125－